Series Lineup
・SPP9600・SPP3800
Feature
[SPP9600]
・The pitch polisher is a device capable of processing surfaces requiring absolute flatness and mirror-like finishes, such as optical flats, high-precision mirrors, optical glass, and the base reference surfaces of precision measuring instruments for metal products.
The flatness achieved by this device is 30 nm per square meter. To put this in perspective, if applied to the 200-meter Tokyo Dome, it would correspond to a height difference of 0.006 mm within the stadium.
・Additionally, as a key feature of the device, the table utilizes specialized granite to minimize thermal variation, ensuring long-term precision maintenance.
Our dedicated surface plate correction conditioner and ultra-high-precision gantry facing unit consistently deliver the highest level of machining performance.
[SPP3800]
・The world’s only high-precision Oscar-type polishing machine compatible with 10th-generation liquid crystal photomasks, capable of accommodating plates with a maximum diagonal dimension of 2400mm.
The workholding head rotates 105 degrees during workpiece changeover, enabling easy attachment and removal of workpieces.
The grinding section of this machine employs rust-resistant materials and a low-dust structure to prevent scratches on the workpiece.
・The polishing table uses granite to minimize thermal deformation caused by grinding, thereby preventing displacement of the table’s flatness.
Additionally, since the grinding slurry is supplied from both sides of the workpiece and from the center of the grinding pad, stable slurry supply is possible across the entire surface of the workpiece.
・An arm that radially swivels the pressurized workhead on the grinding table, featuring both swivel and vertical movement functions.
The oscillation mechanism of this device is driven by an AC servo motor, enabling changes to the oscillation speed, oscillation angle, and applied pressure during process execution.
