Series Lineup
400 Series (Front and Rear 400mm)
600 Series (Front and Rear 600mm)
800 Series (Front and Rear 800mm)
*As this series is designed for users performing ultra-precision machining, consultation is required on a case-by-case basis.
Concept
The ultimate ultra-precision surface grinder, designed to achieve near-zero precision through its unique six-sided constrained sliding mechanism, variable hydrostatic slide system, and ultra-precise temperature control.
Feature
・Minimizing table lift as much as possible and ensuring the grinding wheel always contacts the work surface at the same height during left and right table reversals are critical factors for achieving good surface roughness. The variable hydrostatic slide system offers high rigidity, maintaining a constant gap across the entire work surface.
・This ultra-precision surface grinder achieves straightness accuracy of 0.4 μm/800 m in the longitudinal direction and 0.5 μm/m or less in the transverse direction (UPG408NC).
・Workpieces were placed sequentially on the left, center, and right sides of the chuck for grinding. Eight measurements were taken at each position, totaling 24 points. The overall flatness evaluation results showed all positions within 0.5μm, proving resistance to uneven loading.
