CNC Rotary Ultra-Precision Surface Grinding Machine
UPR3NC / UPR18NC
CNC Ultra Planarization Rotary Surface Grinding Machine 〜Achieving More Reliable Ultra-Precision and High Productivity〜

Series Lineup

UPR3NC chuck size φ300mm
UPR18NC chuck size φ1,800mm

Concept

A rotary grinding machine ideal for high-precision gap machining adapted for ultra-high-speed spindles, as well as circular machining of CD molds, precision blades, and similar components.

Feature

UPR3NC
・An ultra-precision rotary surface grinding machine built with the largest-class variable hydrostatic slide system/table and air bearing/rotary table systems, designed for ultra-precision machining with parallelism/flatness within 0.3μm/φ300mm.

・The rotary table employs air bearings. Rotational accuracy achieves 0.05μm for both radial and axial directions.

・By transferring ultra-precise straight-line motion accuracy to the workpiece, the minimum setting unit for vertical cutting is achieved at 10 nm.

UPR18NC
・Machine specifications vary depending on the application, so customization is required along with the specification layout.

(Specifications are subject to consultation)

※Photo shown with optional accessories.
Precision Surface Grinding Machine
Semiconductor Equipment Device
Peripheral
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