SiC Ingot Grinding Machine
SiC Ingot Grinder ~Fully Automated SIC Ingot Processing Equipment~

Series Lineup

・UGM360NC2HX・OGM390NC2HX

Concept

Fully automatic feeding possible by connecting two units

Feature

・UGM360NC2HX
Grinding of both end faces after C-plane orientation measurement using XRD
・OGM390NC2HX
After peripheral finishing, perform orientation measurement via XRD and apply notching or orifice processing.

Supported workpiece sizes: 6“ 8”

Precision Surface Grinding Machine
Semiconductor Equipment Device
Peripheral
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