Semiconductor-related manufacturing equipment 
Square table polishing machine SPH3000
Polishing Machine 〜Polishing Machine Developed for Nozzle Processing in Coating Equipment〜

Series Lineup

SPH3000

Concept

Polishing machine with head lateral movement for handling long workpieces

Feature

・We have developed a polishing machine with a head that moves left and right for processing nozzles used in coating equipment, such as T-dies and slot dies.

・The footprint is compact at 5.4m wide × 2.5m deep, smaller than conventional round table designs. It also allows front-to-back movement for nozzle processing.

※Photo shown with optional accessories.
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Semiconductor Equipment Device
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