Rotary Precision Surface Grinding Machine
PRG-DX Series
Precision Rotary Surface Grinding Machine Series 〜Achieving high-quality machining efficiently from single-piece production to mass production〜

Series Lineup

PRG6DX chuck size φ600mm
PRG8DX chuck size φ800mm

Concept

A unique portal-type rotary grinding machine achieving a minimum feed increment of 0.1μm

Feature

・The unique gantry structure ensures stable feed and high precision. Since the tool spindle moves along the gantry guide surfaces, it offers excellent operability and minimizes posture changes during cutting. Operators can perform setup without changing their work position, and the low height of the chuck top surface facilitates easy workpiece loading and unloading.

・The tool axis vertical and horizontal feed is controlled by a proprietary control unit and AC servo motor, achieving precise accuracy. The minimum cutting depth setting is configurable to 0.1μm.

・Equipped with an automatic cycle: rough grinding ⇒ fine grinding ⇒ spark-out ⇒ workpiece peripheral edge stop. During the automatic cycle, adjustments are possible for step-by-step feed for finishing operations, table rotation speed, total stock removal remaining, and variable feed rates.

※Photo shown with optional accessories.
Precision Surface Grinding Machine
Semiconductor Equipment Device
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